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SBIR Phase I: Diode-Laser Sensors for Real-Time Control of Semiconductor…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
69073
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
0340422
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
LOS GATOS RESEARCH
67 E EVELYN AVE STE3 Mountain View, CA 94041-1529
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2004
Title: SBIR Phase I: Diode-Laser Sensors for Real-Time Control of Semiconductor Processing
Agency: NSF
Contract: 0340422
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research (SBIR)Phase I project proposes to support the development of a real-time, insitu sensor for the monitoring and control of next-generation semiconductor etch tools. The sensor is based on ultrasensitive diode-laser absorption techniques for measurements of important native etch products (HF, DF, CO). This novel sensor system will measure concentrations of native etch products insitu with high sensitivity, accuracy, speed and specificity, eliminating the need for auxiliary etch stop layers. These auxiliary etch stop layers, which are currently used for control of the etch process, increase layer capacitance, and hence reduce operating speed of the devices in production. This sensor system has direct commercial impact on the next-generation etch tools and their process capabilities. The real-time control afforded by this sensor system will likely become an industry standard and become a critical subcomponent of the semiconductor etch tool market. Application to other plasma-based process tools is a natural extension of this technology, as well as extension to other application areas including industrial process control, vehicle engine testing, and atmospheric and environmental monitoring.

Principal Investigator:

Thomas Owano
PI
6509657713
t.owano@lgrinc.com

Business Contact:

Anthony O?Keefe
6509657772
aoklgr@ix.netcom.com
Small Business Information at Submission:

Los Gatos Research
67 East Evelyn Avenue, Suite 3 Mountain View, CA 94041

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No