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Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
77777
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
054116
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
LOS GATOS RESEARCH
67 E EVELYN AVE STE3 Mountain View, CA 94041-1529
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2007
Title: Nonintrusive Optical Thermometers for Real-Time Control of Fabrication Processes
Agency: NASA
Contract: NNC07CA33C
Award Amount: $599,813.00
 

Abstract:

In the proposed SBIR Phase I program LGR will develop and deploy a novel instrument ("Optical Thermometer") that provides real-time, in situ, non-contact measurements of substrate temperature in optical coating reactors. The instrument will employ an inexpensive diode laser, fiber optic components, and established laser interferometry methods to determine substrate temperature at multiple locations with a replicate precision of better than 0.01 degrees C in a measurement time of less than 0.01 seconds. The precision may be improved with increasing measurement time, if desired. The "Optical Thermometer" will be demonstrated on optical substrates made of a variety of materials in state-of-the-art industrial reactors specializing in UV, visible, near-IR and mid-IR optical coatings. The fast response of the sensor will enable coaters to use, for the first time, precise measurements of bulk substrate temperature to identify temperature nonuniformities during the coating process, refine and improve coating processes in real time, and minimize interwafer and batch-to-batch variations through closed-loop process control.

Principal Investigator:

Douglas A. Baer
Principal Investigator
6509657772
d.baer@lgrinc.com

Business Contact:

Anthony R. O'Keefe
President
6509657772
a.okeefe@lgrinc.com
Small Business Information at Submission:

Los Gatos Research
67 East Evelyn Avenue, Suite 3 Mountain View, CA 94041

EIN/Tax ID: 770358688
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No