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Maskless Lithography for Fabrication of Microelectronics with 100 nm Features

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
LumArray, Inc.
15 Ward Street Somerville, MA 02143-4241
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2005
Title: Maskless Lithography for Fabrication of Microelectronics with 100 nm Features
Agency / Branch: DOD / DARPA
Contract: W31P4Q-05-C-R156
Award Amount: $749,257.00


The proposed Phase II program will produce in 1 year a low-cost, flexible, maskless-lithography tool, the Model 150A, capable of patterning arbitrary-geometries at minimum half-pitch features of 150 nm. This tool will meet the unique needs of DOD and ASIC practitioners for custom circuits, as well as the needs of a growing community in nanoscale science and engineering. The Model 150A, will employ an array of 1000 Fresnel phase-zone-plates, a 400 nm wavelength laser source, a spatial-light modulator, a laser-interferometer-controlled stage, and data handling suitable for a throughput of 1/2 to several wafers per hour. The Model 150A will be marketed to government, industrial and academic research institutions at a small fraction (~1/50) of the projected cost of a competitive tool being developed in Europe. The Model 150A will provide circuit designers with greater flexibility and enable them to maximize their creativity by eliminating the constraints imposed by mask-based lithography. The 1-year Phase-II SBIR, along with about $2M of external investment, will provide all the elements needed for LumArray to commence manufacturing and marketing the Model 150A, leading to a profitable company in the 2nd or 3rd year of operation.

Principal Investigator:

Henry I. Smith

Business Contact:

Nicholas Economou
Small Business Information at Submission:

60 Vassar Street Bldg. 39, Room 427 Cambridge, MA 02139

EIN/Tax ID: 550815121
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No