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Zone-Plate-Array Lithography for Mask Making and Military Integrated-Circuit…

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
82563
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
N071-035-0179
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
LumArray, Inc.
15 Ward Street Somerville, MA 02143-4241
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2007
Title: Zone-Plate-Array Lithography for Mask Making and Military Integrated-Circuit (IC) Manufacturing
Agency / Branch: DOD / NAVY
Contract: N68335-07-C-0217
Award Amount: $149,965.00
 

Abstract:

The zone-plate-array-lithography (ZPAL) system being commercialized by Lumarray, Inc. (the ZP-150) is proposed as the ideal means of providing quick turn-around on masks for DoD integrated-circuit manufacturing, as well as for maskless direct patterning of wafers. We propose to deliver 10 photomasks, made on the ZP-150, to the University of Maryland and 3 photomasks to a DoD manufacturer. In addition, three wafers will be exposed on the ZP-150 for both Univ. Maryland and the DoD manufacturer. Maskless lithography is the most cost-effective solution for manufacturing IC's in low volume. ZPAL has delivered high-quality lithography, and promises pattern-placement accuracy and throughput that is superior to what is possible with electron-beam lithography. We show that by means of absorbance modulation, ZPAL technology can be extended to sub-20 nm resolution, and that anticipated improvements in the pixel count and addressing rate of spatial-light modulators will enable ZPAL throughput to approach that of optical-projection lithography.

Principal Investigator:

Henry I. Smith
Principal Investigator
6172536865
hismith@lumarray.com

Business Contact:

Henry I. Smith
President
6172536865
hismith@lumarray.com
Small Business Information at Submission:

LUMARRAY, INC.
15 Ward Street Somerville, MA 02143

EIN/Tax ID: 202394522
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No