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SBIR Phase I: Dual-Wavelength Diffractive Optics for Absorbance-Modulation…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
88233
Program Year/Program:
2008 / SBIR
Agency Tracking Number:
0740100
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
LumArray, Inc.
15 Ward Street Somerville, MA 02143-4241
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2008
Title: SBIR Phase I: Dual-Wavelength Diffractive Optics for Absorbance-Modulation Optical Lithography
Agency: NSF
Contract: 0740100
Award Amount: $99,999.00
 

Abstract:

This Small Business Innovation Research Phase I project is to design dual wavelength diffractive optics for maskless absorbance modulation optical lithography. Absorbance-modulation optical lithography (AMOL) can achieve nanoscale resolution, while getting rid of the expensive photomask. Successful development of a maskless absorbance modulation optical lithograpy system will provide nanoscale resolution at lower costs than scanning electron beam lithography. This technology provides a combination of resolution and writing speed that is currently unavailable, and hence, will create a paradigm shift in the field of nanomanufacturing.

Principal Investigator:

Rajesh Menon
PhD
6172530979
rmenon@lumarray.com

Business Contact:

Rajesh Menon
PhD
6172530979
rmenon@lumarray.com
Small Business Information at Submission:

LUMARRAY LLC
15 WARD ST Somerville, MA 02143

EIN/Tax ID: 202394522
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No