Miniature Solid-State Sulfur Oxide Sensor for Emissions Measurement
Makel Engineering Incorporated (MEI) and Case Western Reserve University (CWRU) propose to develop a MEMS based, minature solid state sulfur oxide sensor for use in emission measurements. The result of this effort will be a compact, robust means of SOx monitoring in high temperature gas emission streams has not been developed previously. The proposed system is based on previous research on advanced micro-machined gas detection sensors developed for sensitivity to other gaseous components (e.g. CO2, O2, NOx).
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