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Company Information:

Company Name: Medox Electro-optics Inc.
City: Ann Arbor
State: MI
Zip+4: 48105
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $51,411.00 1
SBIR Phase II $508,619.00 1

Award List:

HIGH BRIGHTNESS X-RAY SOURCES FOR X-RAY LITHOGRAPHY

Award Year / Program / Phase: 1990 / SBIR / Phase I
Agency / Branch: DOD / DARPA
Principal Investigator: Philippe Bado
Award Amount: $51,411.00

HIGH BRIGHTNESS X-RAY SOURCES FOR X-RAY LITHOGRAPHY

Award Year / Program / Phase: 1991 / SBIR / Phase II
Agency / Branch: DOD / DARPA
Principal Investigator: Philippe Bado
Award Amount: $508,619.00
Abstract:
Laser driven plasma sources are potential x-ray sources for microlithographic applications. unfortunately, to date, these plasma sources have not produced the x-ray intensities required for large scale manufacturing. chirped pulse amplification, an innovative laser architecture concept, compatible… More