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HIGH BRIGHTNESS X-RAY SOURCES FOR X-RAY LITHOGRAPHY

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 13385
Amount: $508,619.00
Phase: Phase II
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1991
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
1919 Green Rd - A-128
Ann Arbor, MI 48105
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Philippe Bado
 (313) 930-0365
Business Contact
Phone: () -
Research Institution
N/A
Abstract

LASER DRIVEN PLASMA SOURCES ARE POTENTIAL X-RAY SOURCES FOR MICROLITHOGRAPHIC APPLICATIONS. UNFORTUNATELY, TO DATE, THESE PLASMA SOURCES HAVE NOT PRODUCED THE X-RAY INTENSITIES REQUIRED FOR LARGE SCALE MANUFACTURING. CHIRPED PULSE AMPLIFICATION, AN INNOVATIVE LASER ARCHITECTURE CONCEPT, COMPATIBLE WITH MOST SOLID STATE SOURCES, IS CAPABLE OF INCREASING THE PEAK POWER OF SMALL LASER SYSTEMS ONE THOUSAND FOLD. THIS PHASE I PROGRAM WILL QUANTITATIVELY EVALUATE THE ONE TO THREE ORDERS OF MAGNITUDE CAPABILITY ENHANCEMENT ANTICIPATED FROM THE INTRODUCTION OF CHIRPED PULSE AMPLIFICATION IN THE DESIGN OF X-RAY LITHOGRAPHIC SOURCES. IN PARTICULAR, WE WILL ANALYZE: 1. THE UPGRADING OF EXISTING LASER-DRIVEN PLASMA SOURCES AND, 2. THE SYNERGISM RESULTING FROM THE COMBINED USE OF ADVANCED SOLID-STATE GAIN MEDIA WITH CHIRPED PULSE AMPLIFICATION. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - THROUGH THE USE OF CHIRPED PULSE AMPLIFICATION (CPA), WE WILL SIGNIFICANTLY ENHANCE THE X-RAY INTENSITIES PRODUCED BY LASER-DRIVEN PLASMA SOURCES. CPA BASED SOLID-STATE LASERS CAN MEET THE INDUSTRY THROUGHPUT REQUIREMENT AND ARE A COMPACT ALTERNATIVE TO SYNCHROTRON-BASED SOURCES. KEY WORDS - X-RAY SOURCE, X-RAY LITHOGRAPHY, SOLID-STATE LASER, CHIRPED PULSE AMPLIFICATION.

* Information listed above is at the time of submission. *

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