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STTR PHASE I: Application of an Electrostatic Actuator Stable-Range-of-Motion…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
88516
Program Year/Program:
2008 / STTR
Agency Tracking Number:
0741195
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
MEMSense, LLC
2693D Commerce Rd. Rapid City, SD 57702 8071
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2008
Title: STTR PHASE I: Application of an Electrostatic Actuator Stable-Range-of-Motion Enhancement Control Law to Improve MEMS Gyroscopic Sensors
Agency: NSF
Contract: 0741195
Award Amount: $149,020.00
 

Abstract:

This STTR Phase I research project will seek to significantly reduce the size and cost of MEMS gyroscopes through improving the internal electrostatic actuators. Specifically, this effort will commercialize Auburn University's patent protected technique for extending the stable range of motion of micromachined gap-closing actuators, so that the actuator size can be reduced while still producing the same range of motion. This technique not only increases the actuator's stable range of motion, it also allows for a denser architecture, further reducing actuator size. Auburn University will utilize its expertise and facilities to characterize and optimize the proposed technique. The scientific merit of this effort also includes the development of a sensorless technique for increasing the stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators that can be applied to many types of MEMS devices in addition to gyroscopes. A limitation of many types of MEMS devices has been the limited stable range of motion of micromachined electrostatic parallel plate and gap-closing actuators, with applications such as variable capacitors, micro mirror based spatial light modulators and precision inertial sensors that utilize actuators. Most techniques developed to alleviate this problem either involve expensive changes to the physical design or complex motion sensor based controller approaches. This research can lead to new MEMS products, the application of existing MEMS products to new applications, and an enhanced understanding of the capabilities and limitations of micromachined devices.

Principal Investigator:

Samuel B. French
MS
6053422553
sfrench@memsense.com

Business Contact:

Samuel B. French
MS
6053422553
sfrench@memsense.com
Small Business Information at Submission:

MEMSense, LLC
2693D Commerce Rd. Rapid City, SD 57702

EIN/Tax ID: 203349102
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
Auburn University
215 E Thach Ave
Auburn, AL 36830
Contact: Gene Taylor
Contact Phone: (334) 844-5956
RI Type: Nonprofit college or university