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Innovative Manufacturing of Low-Cost RF MEMS

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
MEMtronics Corporation
1301 N. Plano Road Richardson, TX -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Innovative Manufacturing of Low-Cost RF MEMS
Agency / Branch: DOD / MDA
Contract: DASG6003P0086
Award Amount: $68,452.00


"Recent advances in electronic device technology, specifically microelectromechanical systems for RF frequencies (RF MEMS), have resulted in the development of near-ideal electronic switches for controlling and routing RF energy. These switches requirenegligible power consumption, have extremely low insertion loss, and extremely high linearity, which far exceeds that obtainable with pin diode or GaAs FET switch technology. The power reductions over pin diode technology, and size and weight reductionsover ferrite phase shifters offer dramatic improvements in prime power consumption, size, and weight for future military missions, especially for airborne and space-based systems.Though RF MEMS have demonstrated world-class performance in phase shifters and filters, they still require further development. Currently, there are three major issues at the forefront of RF MEMS development: cost, reliability, and packaging. Toameliorate the cost and reliability issues, during Phase I MEMtronics will: 1) Investigate alternative, low-cost manufacturing approaches to fabricating RF MEMS devices; 2) Develop a process technology roadmap for implementing these potential low-costmanufacturing approaches; and 3) Develop a first order manufacturing cost model. During Phase II, MEMtronics will demonstrate manufacturing and design improvements which will lead to a 5-10X reduction in cost. Anticipated benefits of the proposedmanufacturing techniques f

Principal Investigator:

David Forehand
VP Technology Development

Business Contact:

Chuck Goldsmith
Small Business Information at Submission:

Memtronics Corp.
3000 Custer Road Suite 270-400 Plano, TX 75075

EIN/Tax ID: 752953681
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No