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Company Information:
Name:
MiCell Technologies, Inc.
Address:
7516 Precision Dr.
Raleigh, NC 27617
Raleigh, NC 27617
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
Yes
URL:
N/A
Phone:
(919) 313-2108
Award Totals:
Award List:
Wafer Level Supercritical Carbon Bioxide-Based Metal Depositon for Microelectronic Applications
Award Year / Program / Phase:
2004 / SBIR / Phase I
Agency:
EPA
Principal Investigator:
James P. DeYoung, Director of R&D
Award Amount:
$70,000.00
Abstract:
This proposal describes the application, development and commercial scale-up of a process successfully developed under EPA contract number EP-D-04-042 for the deposition of copper and copper barrier materials such as ruthenium, titanium and other metals. This process could replace CU electroplating… More
Wafer Level Supercritical Carbon Bioxide-Based Metal Depositon for Microelectronic Applications
Award Year / Program / Phase:
2005 / SBIR / Phase II
Agency:
EPA
Principal Investigator:
James P. DeYoung, Director of R&D
Award Amount:
$225,000.00
Abstract:
This proposal describes the application, development and commercial scale-up of a process successfully developed under EPA contract number EP-D-04-042 for the deposition of copper and copper barrier materials such as ruthenium, titanium and other metals. This process could replace CU electroplating… More