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Scaleable Process for Integrated, High Frequency Capacitors

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
59004
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
02-0495
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
nGimat Co.
1824 Willow Trail Parkway Norcross, GA -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2003
Title: Scaleable Process for Integrated, High Frequency Capacitors
Agency / Branch: DOD / MDA
Contract: DTRA0102C0074
Award Amount: $750,000.00
 

Abstract:

Stimulated by the explosive growth in the electronics and telecommunication industries, there is an accelerated demand for high permittivity, thin film capacitors with reduced size for high frequency applications including signal decoupling, filtering, andimpedance matching. Ferroelectric films have outstanding dielectric properties that make them suited for a wide range of capacitor applications, including high frequencies (> 1 GHz). MicroCoating Technologies (MCT) has made rapid progress in developingthe necessary oxide materials, fabricating and testing capacitors, and achieving the commercial goals of the SBIR Phase I. MCT's accomplishments include 1) attracting substantial commercial interest and recruitment of industrial partners and 2) dielectricconstant of 1500 with low leakage (10-7 A/cm2). Phase II targets the development of the novel conductive/ferroelectric materials based capacitors on high Q substrates via CCVD technology. The resultant CCVD prototype equipment will realize at least 30%cost savings compared to pulsed laser deposition and metalorganic CVD systems, while meeting or exceeding device performance requirements. Successful achievement of Phase II goals will result in a commercially viable technology to process ferroelectricfilms on large wafers. Commercialization will occur via a combination of component sales to the market and process licensing with equipment sale to strategic customers.

Principal Investigator:

Todd A. Polley
Sr. Research Scientist
6782873913
tpolley@microcoating.com

Business Contact:

Jeffrey C. Moore
Chief Operating Officer
6782872403
jmoore@microcoating.com
Small Business Information at Submission:

MICROCOATING TECHNOLOGIES, INC.
5315 Peachtree Industrial Blvd Atlanta, GA 30341

EIN/Tax ID: 582089229
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No