USA flag logo/image

An Official Website of the United States Government

Generation and Deposition of Nanoscale Particles for Reference Wafers

Award Information

Department of Commerce
Award ID:
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
5910 RICE CREEK PKWY, STE 300 SHOREVIEW, MN 55126-5028
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Phase 1
Fiscal Year: 1995
Title: Generation and Deposition of Nanoscale Particles for Reference Wafers
Agency: DOC
Contract: 26
Award Amount: $49,767.00


In the semiconductor industry, standard reference wafers are needed for calibrating wafer surface scanners. Scanners are currently available for detecting particles down to a lower size limit of approximately 100 nm (0.1 um). Advanced wafer scanners capable of detecting particles to 60 nm will be needed for future generation of devices such as the 1 Gbit DRAMs (dynamic random access memory) expected by the year 2002. This proposal is concerned with developing advanced concepts for generating and depositing PSL spheres to 30 nm. In the Phase I proposal, the lower size limit of the current PSL generation methods will first be established experimentally. Various atomizer concepts will then be explored to identify those capable of producing fine droplets with a maximum droplet diameters in the 0.1-0.5 um range in order to reduce the residue particles to the < 10 nm diameter range. The residue particles are formed when empty water droplets containing dissolved impurities are evaporated. Since they are generated and deposited simultaneously with the PSL spheres, they must be of a considerably smaller size than the PSL in order to avoid interfering with the PSL in producing light scattering signals for wafer scanner calibration.

Principal Investigator:

James Jinjun Sun
Manager, R&D

Business Contact:

Small Business Information at Submission:

Msp Corp.
1313 Fifth Street S.E. Suite 206 Minneapolis, MN 55414

Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No