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High Efficiency MEMS Based Cryocooler

Award Information

National Aeronautics and Space Administration
Award ID:
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Nanohmics, Inc
6201 East Oltorf St. Suite 400 Austin, TX 78741-7511
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2004
Title: High Efficiency MEMS Based Cryocooler
Agency: NASA
Contract: NNA04CA10C
Award Amount: $899,404.00


In this SBIR program, Nanohmics is developing an ultrahigh efficiency MicroElectroMechanical System (MEMS) cryogenic cooling system. The cryocooler is based on a Stirling Engine that is operating in reverse mode (mechanical-to-thermal) transduction. These devices show particular promise as MEMS coolers for integrated circuits and other planar detection arrays. This program improves on past work to develop a MEMS-based Stirling cryocooler that will dramatically improve the cryocooler performance and simplify device construction. The improvements to be included in this program are replacing the silicon heat exchanger plates and flexible membranes with high thermal conductivity diamond and monolithically constructing the gas impervious walls and regenerator portion of the device using quartz (SiO2). In Phase I of this program, Nanohmics examined the effects of introducing these materials into Stirling cryocoolers in the MEMS setting. This included thermal modeling of the proposed structure and examination of the operating parameters to produce optimum performance. Nanohmics also developed the process steps necessary to fabricate the device. In Phase II Nanohmics proposes to fabricate and test a prototype device based on the Phase I design.

Principal Investigator:

Keith Jamison
Principal Investigator

Business Contact:

Keith Jamison
Business Official
Small Business Information at Submission:

Nanohmics, Inc.
6201 East Oltorf St, Suite 100 Austin, TX 78741

EIN/Tax ID: 743072245
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No