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Innovative, High-Throughput, Large-Area, Versatile Nanoimprint Tools

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
53333
Program Year/Program:
2001 / SBIR
Agency Tracking Number:
01SB2-0142
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Nanonex Corporation
1 DEERPARK DR STE O MONMOUTH JUNCTION, NJ 08852-1920
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2001
Title: Innovative, High-Throughput, Large-Area, Versatile Nanoimprint Tools
Agency / Branch: DOD / DARPA
Contract: DAAH0102CR059
Award Amount: $99,000.00
 

Abstract:

Based on the previous extensive work on NIL in Prof. Chou's group and at Nanonex Corporation, the objective of the project is to further develop a promising innovative nanoimprint lithography (NIL) machine design. The design, using a new principle, offersnot only excellent uniformity of nanostructures over large areas, high-throughput (<60 sec per wafer), and scalable to 12

Principal Investigator:

Linshu Kong
Project Manager
6096833973
lkong@nanonex.com

Business Contact:

Lin Chou
President
6096833973
linchou@nanonex.com
Small Business Information at Submission:

NANONEX CORP.
7 FOULET DRIVE PRINCETON, NJ 08540

EIN/Tax ID: 223672235
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No