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Nanoimprint Lithography of Parallel Patterning of Nanoscale Magenetoelectronic…

Award Information

Agency:
Department of Defense 		Branch:
Navy 		Award ID:
59532 		Program Year/Program:
2002 / SBIR
Agency Tracking Number:
N02-055-05 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
NANONEX CORPORATION
1 Deer Park Drive Suite O Monmouth Junction, NJ -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: Nanoimprint Lithography of Parallel Patterning of Nanoscale Magenetoelectronic Devices
Agency / Branch: DOD / NAVY
Contract: N00014-02-M-0115
Award Amount: $69,852.00
 

Abstract:

"The goal of the project is to develop nanoimprint lithography based fabrication processes for low-cost, parallel patterning of magnetic device structures of a size below 50 nm feature size. In particular, nanoimprint lithography (NIL) and reactive ionetching (RIE) of nanoscale rectangles and hollow cylinders in insulators will be studied. A variety of NIL masks will be fabricated using electron-beam lithography and RIE. NIL processes, resists and machines will be investigated to make them suitable tomeet the particular needs of fabrication of nanomagnetoelectronic devices. A variety of reactive ion etching (RIE) recipes will be explored to ensure the high-fidelity etching of these nanoscale structures.Several key technical personnel of Nanonex Corporation are former post-docs and graduate students of Prof. Chou of Princeton University's group, and are experts in nanofabrication, particularly NIL, RIE, and nanomagnetic structures. Professor Chou willserve as a consultant to the proposed project. The success of the proposed project will present a significant step forward in fabricating nanoscale magneto-electronic devices. Such devices are essential to many Navy and other military hardwires. Thefabrication technology can also benefit other nanostructures needed in military and civilian applications."

Principal Investigator:

Linshu Kong
Project Manager
6096833973
lkong@nanonex.com

Business Contact:

Lin W. Chou
President
6096833973
linchou@nanonex.com
Small Business Information at Submission:

Nanonex Corp.
7 FOULET DRIVE PRINCETON, NJ 08540

EIN/Tax ID: 223672235
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No