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In-situ, Real-Time Process Characterization and Control in Nanoimprint…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
68829
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
04SB1-0519
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Nanonex Corporation
1 DEERPARK DR STE O MONMOUTH JUNCTION, NJ 08852-1920
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2004
Title: In-situ, Real-Time Process Characterization and Control in Nanoimprint Lithography and In-Situ Template Cleaning
Agency / Branch: DOD / DARPA
Contract: W31P4Q-04-C-R208
Award Amount: $98,905.00
 

Abstract:

The goal of the project is to (a) further develop an innovative in-situ real-time characterization tool for nanoimprint lithography (NIL) processes and (b) in-situ template cleaning using a laser beam. The characterization tool is based on real-time diffractive scatterometry and can measure many important imprint parameters (e.g. imprint depth, imprint speed, the resist deformations, etc) in-situ and real time. The tool can uniquely and significantly enhance the performance and yields of NIL. The innovative method is based on some recent developments at Prof. Chou's group and licensed to Nanonex Corporation.

Principal Investigator:

Larry Koecher
COO
7323551600
lkoecher@nanonex.com

Business Contact:

Larry Koecher
COO
7323551600
lkoecher@nanonex.com
Small Business Information at Submission:

NANONEX CORP.
7 FOULET DRIVE PRINCETON, NJ 08540

EIN/Tax ID: 223672235
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No