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IMPROVED RTP TEMPERATURE MEASUREMENT TECHNOLOGY

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
12768
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
12768
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
OPTRA, Inc
461 Boston Street Topsfield, MA 01983-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: IMPROVED RTP TEMPERATURE MEASUREMENT TECHNOLOGY
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $48,355.00
 

Abstract:

OPTRA WILL DEMONSTRATE AN IMPROVED TEMPERATURE MEASUREMENT SYSTEM UTILIZING LASER EXTENSOMETER TECHNOLOGY FOR USE IN THE RAPID THERMAL PROCESSING (RTP) OF SILICON WAFERS. THE SYSTEM WILL DETERMINE REAL-TIME SILICON WAFER TEMPERATURES TO 0.1 DEG C ACCURACY AND RESOLUTION AND WILL HAVE A MEASUREMENT BANDWIDTH OF MORE THAN 200 HZ. THE SYSTEM WILL BE SUITABLE FOR CLOSED LOOP CONTROL OF RTP OVENS AND WILL OFFER IMPROVED PERFORMANCE OVER EXISTING PYROMETRIC TECHNOLOGY IN TERMS OF ACCURACY, RESOLUTION AND RELIABILITY. THE SYSTEM WILL BE ENTIRELY NON-CONTACTING AND WILL BE ADAPTABLE TO EXISTING RTP DESIGNS.

Principal Investigator:

David W Voorhes
5089212100

Business Contact:

Small Business Information at Submission:

Optra Inc
66 Cherry Hill Dr Beverly, MA 01915

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No