USA flag logo/image

An Official Website of the United States Government

Monolithic Deformable Membrane Mirror for High Energy Laser Applications

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
2004 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Optron Systems, Inc.
235 Bear Hill Rd Ste 200 Waltham, MA 02451-1060
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Phase 2
Fiscal Year: 2004
Title: Monolithic Deformable Membrane Mirror for High Energy Laser Applications
Agency / Branch: DOD / USAF
Contract: FA9451-04-C-0142
Award Amount: $749,920.00


To address the high-speed, low-cost, low-weight, and compact requirements of space- and air-borne high-energy-laser adaptive optical systems, this Phase II program will design, test and fabricate a monolithic, high-energy, membrane-based deformable multi-layer-dielectric mirror using a rigid-plate electrostatic MEMS-actuator array. The actuators will be VLSI-chip driven, and in the program, a six-inch wafer will provide a 100 x 100 array of actuators on 1-mm centers. In particular, the Phase II will focus on the problems of electrostatic MEMS actuator design and fabrication, high-voltage VLSI-MEMS driver chip design and fabrication, prototype modulator assembly, and the high-speed electronic control of the device. The proposed modulator is designed to offer: large stroke (8 ¿m), low-voltage (~100 V) and low power operation, low weight, scalability to millions of actuators, fast rise time (10 microsecond), electrically-independent actuators, excellent surface figure with 8-bit grayscale phase resolution, high laser power damage threshold, compatibility with system architectures that reduce the computations necessary to compensate wavefront distortion, and low manufacturing cost. Our price/performance goal is 10K actuators with a 10 kHz frame rate for $10K.

Principal Investigator:

Jeremy Hui

Business Contact:

Cardinal Warde
Small Business Information at Submission:

3 Preston Court Bedford, MA 01730

EIN/Tax ID: 042758877
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No