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193 NM EXCIMER LASER DEVELOPMENT FOR LITHOGRAPHY

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
15332
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
15332
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
PHYSICAL RESEARCH, INC.
25500 Hawthorne Blvd., Suite 2300 Torrance, CA 90505
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: 193 NM EXCIMER LASER DEVELOPMENT FOR LITHOGRAPHY
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,931.00
 

Abstract:

THE LASER PARAMETERS MOST IMPORTANT TO LITHOGRAPHY APPLICATIONS ARE BEAM QUALITY AND LASER WAVELENGTH. A SIGNIFICANT UP-GRADE OF ARF LASER PERFORMANCE IN THESE KEY AREAS CAN BE ACHIEVED IN AN ALTERNATIVE SYSTEM. AN UNSTABLE RESONATOR CAVITY IN WHICH THE EXCITATION LIFETIME IS ON THE ORDER OF 35 NSEC WILL BE USED AS AN OSCILLATOR. THIS IS MUCH LONGER EXCITATION TIME THAN IN DISCHARGE PUMPED ARF, THEREBY PROVIDING AMPLE TIME FOR THE BUILD-UP OF A HIGH BEAM QUALITY UNSTABLE RESONATOR CAVITY MODE. TEMPORALLY SELECTIVE AMPLIFICATION OF THE LATER PORTION OF THE OSCILLATOR OUTPUT WILL THEN TAKE PLACE IN A SEPARATE AMPLIFIER. THE NET CONVERSION EFFICIENCY OF ARF LASER PHOTONS TO VUV LASER PHOTONS IS PREDICTED TO BE 25%. TUNABLE EXCITATION WILL PERMIT LASING AT WAVELENGTHS OF 151.7, 162, 166, 172, OR 185 NM. USING COMMERCIALLY AVAILABLE LASERS, THE PREDICTED NO LASER OUTPUT AT 162 - 185 NM IS > 55 MJ/PULSE OR > 10 WATTS. SUCCESSFUL DEMONSTRATION OF LASING AT THESE WAVELENGTHS IN PHASE I WILL ULTIMATELY PERMIT THE EXTENSION OF THIS TECHNIQUE TO CO LASING AT 115 NM IN A FOLLOW-ON EFFORT. THIS CORRESPONDS TO A LASER PHOTON ENERGY IN EXCESS OF 10 EV, WHICH IS COMPARABLE TO THE CUT-OFF FREQUENCY OF SYNCHROTRON RADIATION. THE PROPOSED ARF PUMPED SYSTEM WILL PROVIDE AN EFFICIENT, TUNABLE VUV UP-GRADE OF EXISTING ARF LITHOGRAPHY SYSTEMS. THE UP-GRADE WILL SIGNIFICANTLY ENHANCE THE PERFORMANCE OF THESE CURRENT SYSTEMS, PROVIDING A LOW COST, SIMPLE TO OPERATE ALTERNATIVE TO SYNCHROTRON RADIATION SOURCES.

Principal Investigator:

Michael Burrows
Principal Investigator
5057649001

Business Contact:

Small Business Information at Submission:

Physical Research Inc
25500 Hawthorne Blvd Suite 2 300 Torrance, CA 90505

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No