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IMPROVED DRY ETCHING OF MCT USING THE PLASMA QUEST FREE RADICAL REACTOR

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
12845
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
12845
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Plasma Quest Inc
315 N Interurban - Ste 101 Richardson, TX 75081
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: IMPROVED DRY ETCHING OF MCT USING THE PLASMA QUEST FREE RADICAL REACTOR
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

N/A

Principal Investigator:

Dr John E Spencer
2146801811

Business Contact:

Small Business Information at Submission:

Plasma Quest Inc
315 N Interurban - Ste 101 Richardson, TX 75081

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No