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IMPROVED DRY ETCHING OF MCT USING THE PLASMA QUEST FREE RADICAL REACTOR

Award Information
Agency: Department of Defense
Branch: Defense Advanced Research Projects Agency
Contract: N/A
Agency Tracking Number: 12845
Amount: $50,000.00
Phase: Phase I
Program: SBIR
Solicitation Topic Code: N/A
Solicitation Number: N/A
Timeline
Solicitation Year: N/A
Award Year: 1990
Award Start Date (Proposal Award Date): N/A
Award End Date (Contract End Date): N/A
Small Business Information
315 N Interurban - Ste 101
Richardson, TX 75081
United States
DUNS: N/A
HUBZone Owned: No
Woman Owned: No
Socially and Economically Disadvantaged: No
Principal Investigator
 Dr John E Spencer
 (214) 680-1811
Business Contact
Phone: () -
Research Institution
N/A
Abstract

N/A

* Information listed above is at the time of submission. *

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