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COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
17219
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
17219
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Potomac Photonics Inc
4445 Nicole Drive Lanham, MD 20706-4352
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,626.00
 

Abstract:

A SMALL HIGH-REPETITION-RATE ARF LASER UTILIZING MICROWAVE DISCHARGE EXCITATION WILL BE CONSTRUCTED FOR INTERFEROMETRY AND MASTER OSCILLATOR APPLICATIONS IN PHOTOLITHOGRAPHY. THE LASER WILL EXHIBIT A SPECTRAL WIDTH OF APPROXIMATELY 2 PICOMETERS AND IS EXPECTED TO OPERATE IN A LOW-ORDER TRANSVERSE MODE. IT SHOULD BE CAPABLE OF PULSE REPETITION RATES IN EXCESS OF ONE KILOHERTZ. THE PROPOSED LOW-ORDER TRANSVERSE MODE WOULD FIND APPLICATIONS IN INJECTION CONTROL OF LARGER ARF LASERS AND IN UV RAMAN SPECTROSCOPY. IN ADDITION, MANY APPLICATIONS EXIST IN MICROFABRICATION AND CHEMICAL ANALYSIS FOR A FAR ULTRAVIOLET SOURCE WHICH IS COMPACT, WITH REDUCED MAINTENANCE REQUIREMENTS.

Principal Investigator:


0

Business Contact:

Small Business Information at Submission:

Potomac Photonics Inc
4720-e Boston Way Lanham, MA 02706

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No