COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY

Award Information

Agency: Department of Defense	Branch: Defense Advanced Research Projects Agency	Award ID: 17219	Program Year/Program: 1991 / SBIR
Agency Tracking Number: 17219	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: Potomac Photonics Inc
4445 Nicole Drive Lanham, MD 20706-4352
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Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No

Phase 1: Fiscal Year: 1991

Title: COMPACT, QUASI-CW ARF LASERS FOR PHOTOLITHOGRAPHY

Agency / Branch: DOD / DARPA

Contract: N/A

Award Amount: $49,626.00

Abstract:
A SMALL HIGH-REPETITION-RATE ARF LASER UTILIZING MICROWAVE DISCHARGE EXCITATION WILL BE CONSTRUCTED FOR INTERFEROMETRY AND MASTER OSCILLATOR APPLICATIONS IN PHOTOLITHOGRAPHY. THE LASER WILL EXHIBIT A SPECTRAL WIDTH OF APPROXIMATELY 2 PICOMETERS AND IS EXPECTED TO OPERATE IN A LOW-ORDER TRANSVERSE MODE. IT SHOULD BE CAPABLE OF PULSE REPETITION RATES IN EXCESS OF ONE KILOHERTZ. THE PROPOSED LOW-ORDER TRANSVERSE MODE WOULD FIND APPLICATIONS IN INJECTION CONTROL OF LARGER ARF LASERS AND IN UV RAMAN SPECTROSCOPY. IN ADDITION, MANY APPLICATIONS EXIST IN MICROFABRICATION AND CHEMICAL ANALYSIS FOR A FAR ULTRAVIOLET SOURCE WHICH IS COMPACT, WITH REDUCED MAINTENANCE REQUIREMENTS.

Principal Investigator:

0

Business Contact:

Small Business Information at Submission:

Potomac Photonics Inc
4720-e Boston Way Lanham, MA 02706

EIN/Tax ID:

DUNS: N/A

Number of Employees: N/A

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No