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SCANNING TUNNELING MICROSCOPE FOR SUBMICRON DELINEATION IN SEMICONDUCTORS

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
4295
Program Year/Program:
1987 / SBIR
Agency Tracking Number:
4295
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Quan-scan Inc.
959 E Walnut St #110 Pasadena, CA 91106
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1987
Title: SCANNING TUNNELING MICROSCOPE FOR SUBMICRON DELINEATION IN SEMICONDUCTORS
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $110,000.00
 

Abstract:

IMPROVING THE CAPABILITY FOR DELINEATING SUBMICRON FEATURES ON SEMICONDUCTORS IS NECESSARY FOR PRODUCING MORE POWERFUL DEVICES. THE COMMERCIAL SCANNING ELECTRON MICROSCOPE (SEM) FOR SUBMICRON IMAGING IS AVAILABLE BUT CUMBERSOM, EXPENSIVE, AND LIMITED IN RESOLVING POWER. RESOLUTION TO ATOMIC DIMENSIONS HAS BEEN DEMONSTRATED IN THE LABORATORY WITH DEVELOPMENT OF THE SCANNING TUNNELING MICROSCOPE (STM). THIS INSTRUMENT OFFERS DIRECT IMAGING CAPABILITY TO SUBMICRON RESOLUTION AND PROMISES TO BE MORE CONVENIENT TO USE AND LOWER IN COST THAN THE SEM. HOWEVER, SEVERAL TECHNICAL PROBLEMS MUST BE SOLVED BEFORE A COMMERCIALLY VIABLE STM CAN BE REALIZED. WE PROPOSE TO STUDY THE FEASIBILITY OF DEVELOPING A COMMERCIALLY VIABLE STM THAT IS CAPABLE OF DISTINGUISHING FEATURES ON THE ORDER OF FIFTY ANGSTROMS. INNOVATIVE APPROACHES WILL BE SOUGHT TO PROBLEMS IN: STAGING USING PIEZOELECTRIC CERAMICS, PRODUCING TIPS RELIABLY, ISOLATING VIBRATIONS, AND PROVIDING LOW COST DATA PROCESSING CAPABILITY.

Principal Investigator:

Paul E West
8187955991

Business Contact:

Small Business Information at Submission:

Quanscan Inc.
77 N Oak Knoll Ave - #104 Pasadena, CA 91101

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No