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NANOMETER LITHOGRAPHY USING SCANNING TUNNELING MICROSCOPY

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
9019
Program Year/Program:
1989 / SBIR
Agency Tracking Number:
9019
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Quan-scan Inc.
959 E Walnut St #110 Pasadena, CA 91106
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1989
Title: NANOMETER LITHOGRAPHY USING SCANNING TUNNELING MICROSCOPY
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $500,000.00
 

Abstract:

THE ARMY SEEKS APPLICATIONS OF SCANNING TUNNELING MICROSCOPY TO PERFORM LITHOGRAPHY ON MICROELECTRONICS DEVICES. THE EMERGING TECHNOLOGY OF SCANNING TUNNELING MICROSCOPY (STM) IS CAPABLE OF IMAGING SURFACES TO ATOMIC RESOLUTION. QUAN-SCAN PROPOSES TO STUDY THE FEASIBILITY OF APPLYING STM TECHNOLOGY TO ACHIEVE NANOMETER SURFACE ITHOGRAPHY AND DETERMINE WHETHER THE TECHNIQUES CAN PROVE USEFUL FOR FABRICATION OR REPAIR OF 100-ANGSTROM SIZED STRUCTURES. THE EFFORT WILL INVOLVE INVESTIGATING ALTERNATIVE CHEMICAL SYSTEMS FOR DOING LITHOGRAPHIC PROCESSES, DETERMINING THE INSTRUMENTATION REQUIREMENTS FOR DOING LITHOGRAPHY, AND EXAMINING POTENTIAL APPLICATIONS OF THE TECHNIQUES TO MICROELECTRONICS DEVICES.

Principal Investigator:

Dr Paul E West
8187951163

Business Contact:

Small Business Information at Submission:

Quan-scan Inc.
959 E Walnut St #110 Pasadena, CA 91106

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No