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Company Information:

Company Name: R E A Precision Machine Co Inc
City: Westford
State: MA
Zip+4: 01886
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $70,734.00 1

Award List:

A NEW DESIGN FOR OPTICALLY FLAT AND DAMAGE FREE POLISHING OF 3 INCH DIAMETER GAAS AND INP WAFERS

Award Year / Program / Phase: 1987 / SBIR / Phase I
Agency / Branch: DOD / USAF
Principal Investigator: Robert e acheson
Award Amount: $70,734.00
Abstract:
A polishing machine concept was devised for non-abrasive polishing of three inch diameter (or larger) semiconductor wafers of gaas, inp and similar materials. the polishing principle is base on a technique developed by mit lincoln laboratory scientists called "hydroplane polishing of semiconductor… More