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An inexpensive, versatile micro-machined mass spectrometer

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
51633
Program Year/Program:
2001 / SBIR
Agency Tracking Number:
NASA1067
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Research Support Instruments, Inc.
4325-B Forbes Blvd. Lanham, MD 20706-4854
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2001
Title: An inexpensive, versatile micro-machined mass spectrometer
Agency: NASA
Contract: N/A
Award Amount: $69,968.00
 

Abstract:

The inexpensive, versatile micro-machined mass spectrometer (IVM^{2}-MS) is envisioned as a inexpensive replacement for large, complex, macroscopic instruments in use in the field and in the laboratory. At its core it is a 180 degree magnetic deflection mass filter fabricated from Si wafers. A small vacuum chamber for mass separation with an entrance slit and exit slit are micro-machined from the wafer by anistropic etching. An acceleration grid is built over the entrance slit and a small faraday cup built around the exit slit using standard lithographic methods. On the largest dimension they are on the order of 1.5 millimeters, with different accelerator to collector distances useful for changing the m/Z tuning characteristics of the filter. Arrays of such small mass filters can be created on a single wafer, and multichannel detection becomes trivial. Funding is requested to fabricate such a device and perform an elementary proof-of-concept study.

Principal Investigator:

Jon Fox
Principal Scientist
6092581022
fox@researchsupport.com

Business Contact:

Michael Corson
Vice President
3013060010
caledonia@psicorp.com
Small Business Information at Submission:

Research Support Instruments
4325B Forbes Blvd Lanham, MD 20706

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No