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A Micro-Electroformed Cross Capacitor (MECC)

Award Information

Agency:
Department of Commerce
Branch:
N/A
Award ID:
57192
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
7.10.02
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Research Support Instruments, Inc.
4325-B Forbes Blvd. Lanham, MD 20706-4854
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: A Micro-Electroformed Cross Capacitor (MECC)
Agency: DOC
Contract: SB1341-02-W-1077
Award Amount: $74,852.00
 

Abstract:

Utilizing new hard, etch resistant photoresists derived from epoxy formulations such as SU-8 to serve as the mold for electroless metaldeposition for MEMS electroforming techniques, a fully micro-miniaturized cross capacitor can be realized. A Micro-Electroformed Cross Capacitor (MECC) is built by electroforming high aspect metals atop the substrate. A Phase 1 effort would model MECC performance, develop the process steps for fabrication, and finally demonstrate the ability to fabricate a micro-miniaturized cross capacitor.

Principal Investigator:

Jon R. Fox
Principal Scientist
6095800080
fox@researchsupport.com

Business Contact:

George E. Caledonia
President/CEO
caledonia@psicorp.com
Small Business Information at Submission:

Research Support Instruments, Inc.
4325B Forbes Blvd. Lanham, MD 20706

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No