A Micro-Electroformed Cross Capacitor (MECC)
Utilizing new hard, etch resistant photoresists derived from epoxy formulations such as SU-8 to serve as the mold for electroless metaldeposition for MEMS electroforming techniques, a fully micro-miniaturized cross capacitor can be realized. A Micro-Electroformed Cross Capacitor (MECC) is built by electroforming high aspect metals atop the substrate. A Phase 1 effort would model MECC performance, develop the process steps for fabrication, and finally demonstrate the ability to fabricate a micro-miniaturized cross capacitor.
Small Business Information at Submission:
Research Support Instruments, Inc.
4325B Forbes Blvd. Lanham, MD 20706
Number of Employees: