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A Microformed Magnet-Based Microphone/Speaker Array for Active Noise Reduction

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Research Support Instruments, Inc.
4325-B Forbes Blvd. Lanham, MD 20706-4854
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2005
Title: A Microformed Magnet-Based Microphone/Speaker Array for Active Noise Reduction
Agency / Branch: DOD / USAF
Contract: FA8650-05-M-6574
Award Amount: $99,956.00


Research Support Instruments, Inc. (RSI) proposes to develop a MEMS microspeaker/ microphone array for use in active noise reduction (ANR). Micromachined pressure transducers using piezoresistive or capacitive sensing techniques are well developed; this project will instead develop a magnetic microphone. Magnet-based microphones in macroscale technologies have advantages in sensitivity, bandwidth, and ruggedness; similar advantages can be expected on the microscale. The same technology will be used to develop a microspeaker. RSI has an innovative technology to develop micromagnets; using micromagnets in both the microphones and the speakers will ease integration of the two circuits, and take advantage of both technologies. The Phase I program will involve design, fabrication, and test of magnet-based MEMS microphones and speakers to determine their sensitivity, speaker amplitude, ruggedness, and bandwidth. RSI will use its experience in silicon nitride membranes, micromagnets, and pressure sensors to employ a highly innovative microfabricated technology - the magnetic MEMS speaker/microphone array - in order to develop speakers and microphones with a combination of sensitivity and speaker amplitude previously unattained by MEMS-sized devices.

Principal Investigator:

John F. Kline
Principal Research Scientist

Business Contact:

Christopher Rollins
Vice President
Small Business Information at Submission:

20 New England Business Center Andover, MA 01810

EIN/Tax ID: 521700379
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No