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OPTICAL CHARACTERIZATION TECHNIQUES FOR SOI MATERIAL

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
5248
Program Year/Program:
1989 / SBIR
Agency Tracking Number:
5248
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sandia Systems, Inc.
2655 A Pan American Freeway Ne Albuquerque, NM 87107
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1989
Title: OPTICAL CHARACTERIZATION TECHNIQUES FOR SOI MATERIAL
Agency: NSF
Contract: N/A
Award Amount: $210,555.00
 

Abstract:

PRESENT TECHNIQUES OF EXAMING RECRYSTALLIZED SILICON, INCLUDING SOI MATERIAL, INCLUDE A WET (ACID) ETCH AND EXAMINATION WITH AN OPTICAL MICROSCOPE, X-RAY DIFFRACTION, SEM OR TEM MICROSCOPES. THESE TECHNIQUES ARE SLOW, AND USUALLY THE SAMPLE IS DESTROYED. SANDIA SYSTEMS PROPOSES INVESTIGATING ANGLE-RESOLVED LIGHT SCATTER TECHNIQUES AS A METHOD TO EXAMINE RECRYSTALLIZED SILICON AS WELL AS OTHER MICROELECTRONICS MATERIALS. THE TECHNIQUE WOULD BE NONPERTURBING, COULD BE APPLIED IN SITU, WOULD BE FAST, AND COULD BE ADAPTED FOR AUTOMATION.

Principal Investigator:


0

Business Contact:

Rodney jacobson
SENIOR RESEARCH ENGINEER
Small Business Information at Submission:

Sandia Systems
13423 Desert Hills N.e. Alguquerque, NM 87111

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No