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Automated Defect Analysis Using a Doma Scatterometer and Image Analysis

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
20151
Program Year/Program:
1993 / SBIR
Agency Tracking Number:
20151
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sandia Systems, Inc.
2655 A Pan American Freeway Ne Albuquerque, NM 87107
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1993
Title: Automated Defect Analysis Using a Doma Scatterometer and Image Analysis
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $63,881.00
 

Abstract:

We will model the optical scatter produced by different shapes and concentrations of defects using scalar diffraction theory. We will develop image processing techniques which can be used to supply features to analysis routines using the model data and determine the ability of the technique to predict the shape and concentration of defects. We will assemble a dome scatterometer, examine samples of material which have defects similar in shape and density as those which have been modeled, and determine the ability of the image processing techniques to predict defect properties using real samples. Based on the level of success achieved, we will determine modifications necessary for the image processing and analysis techniques and for the dome scatterometer. These changes and an improved dome scatterometer will be implemented in a Phase I effort.

Principal Investigator:

Richard Krukar
5053438112

Business Contact:

Small Business Information at Submission:

Sandia Systems, Inc.
2655a Pan American Freeway Ne Albuquerque, NM 87107

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No