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X-Y Translation Using Terfenol-D and a High Resolution Capacitive Sensor

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
26491
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
26491
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SATCON APPLIED TECHNOLOGY, INC.
1745A West Nursery Rd MS4018 Li, MD -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: X-Y Translation Using Terfenol-D and a High Resolution Capacitive Sensor
Agency / Branch: DOD / NAVY
Contract: N/A
Award Amount: $58,594.00
 

Abstract:

A fast, high accuracy X-Y translation table has been identified as desirable for nano lithography instruments. Over a wafer size of 3"x3", the translation table has to localize to a 20x20 um zone, and within this zone have a positioning accuracy better than 10 nanometers with a sweep speed of 20 um/sec. It is perceived as a two-step positioning problem, slow long range, fast and accurate shorter range servo. Phase I concentrates on designing a fast 2 nanometer resolution X-Y positioning mechanism for the 20x20 um zone. This mechanism will be incorporated into a slower 3"x3" X-Y translational table at a later stage. The key to fast, accurate positioning is a fast actuator and a sensor with high handwidth, accuracy and signal/noise ration. A Terfenol-D based translational actuator together with a 915 MHz capacitive sensor fulfill these requirements adequately. The proposal outlines a Phase I program to design a X-Y translation mechanism and to provide experimental proof of concept by demonstrating a one-degree-of-freedom servo system. Phase I will pave the way for full development of a prototype instrument in a Phase II program and commercialization in Phase III.

Principal Investigator:

Dr. Vijay Gondhalekar
6176610540

Business Contact:

Small Business Information at Submission:

Satcon Technology Corp
12 Emily Street Cambridge, MA 02139

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No