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Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
55362
Program Year/Program:
2001 / SBIR
Agency Tracking Number:
0078419
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SATCON APPLIED TECHNOLOGY, INC.
1745A West Nursery Rd MS4018 Li, MD -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2001
Title: N/A
Agency: NSF
Contract: 0078419
Award Amount: $341,175.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase II project will develop a planar magnetic levitator/positioner for precision microelectronics manufacturing equipment. Based on feasibility proven in Phase I, Phase II will design, construct, and test a minimum-actuator maglev stage that can be readily integrated in a process tool. A single-moving maglev platen will be driven in all six degrees of freedom with three levitation motors. The platen will generate large two-dimensional motions for transportation with small four-axis motions for alignment and small adjustments. It will lead to a clean-room compatible, lightweight, compact, inexpensive structure that can meet demanding dynamic performance requirements in next-generation precision microelectronics manufacturing. Magnetic levitation has many potential applications in microelectronics manufacturing equipment that require precise planar position control, such as wafer steppers, wafer handlers, wire bonders, surface profilometers, scanned probe microscopes, and precision inspection machines. This technology is expected to figure prominently in the highly competitive microelectronics manufacturing capital equipment industry.

Principal Investigator:

Won-jong Kim
9798453645
wjkim@mengr.tamu.edu

Business Contact:

Paul Heintel
Contracts Manager
6173490867
heintel@satc.com
Small Business Information at Submission:

SatCon Technology Corporation
161 First Street Cambridge, MA 02142

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No