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HIGH PULSE RATE EUV RADIATION SOURCE FOR SUB-0.1-MICRON-DESIGN-RULE LITHOGRAPHY

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
43839
Program Year/Program:
2000 / SBIR
Agency Tracking Number:
99-243
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SCIENCE RESEARCH LABORATORY INC
15 Ward Street Somerville, MA -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2000
Title: HIGH PULSE RATE EUV RADIATION SOURCE FOR SUB-0.1-MICRON-DESIGN-RULE LITHOGRAPHY
Agency / Branch: DOD / MDA
Contract: DTRA01-00-C-0086
Award Amount: $1,497,271.00
 

Abstract:

N/A

Principal Investigator:

Daniel Birx
6175471122

Business Contact:

Small Business Information at Submission:

SCIENCE RESEARCH LAB., INC.
15 Ward ST Somerville, MA 02143

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No