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A NON-INVASIVE SENSOR TECHNIQUE FOR PROCESS CONTROL IN PLASMA PROCESSING…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
17413
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
17413
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SCIENTIFIC RESEARCH ASSOC., INC.
P. O. Box 1058, 30C Hebron Avenue Glastonbury, CT 06033
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: A NON-INVASIVE SENSOR TECHNIQUE FOR PROCESS CONTROL IN PLASMA PROCESSING REACTORS
Agency: NSF
Contract: N/A
Award Amount: $49,897.00
 

Abstract:

THIS PROPOSAL ADDRESSES A PROGRAM TO DEVELOP A NONINVASIVE, IN-SITU SENSOR TECHNIQUE FOR APPLICATION IN SEMICONDUCTOR MANUFACTURING. THE PROPOSED SENSOR IS APPROPRIATE FOR DRY PLASMA PROCESSES SUCH AS DEPOSITION AND ETCHING WHICH ARE KEY STEPS IN SEMICONDUCTOR FABRICATION LINE. THE PROPOSED TECHNIQUE CAN PERFORM QUANTITATIVE MEASUREMENT OF CONSTITUENT SPECIES, DETECTION OF APPEARANCE/DISAPPEARANCE OF SPECIES AND CONTAMINANTS, AND END POINT DETECTION. THE ULTIMATE OBJECTIVE OF THIS MULTI-PHASE EFFORT IS TO PROVIDE A RELIABLE PROCESS CONTROL METHOD WITH THE PROPOSED SENSOR AS THE NUCLEUS OF THE PROCESS CONTROL LOOP. THE PROPOSED TECHNIQUE USES LASER INDUCED FLUORESCENCE (LIF)WITH AN INNOVATION TO PERFORM RAPID TEMPORAL AND SPATIAL SCANNING AND HIGH DEGREE OF ACCURACY AND SENSITIVITY. THE INNOVATION INVOLVES USE OF AN ACOUSTO-OPTICAL TUNABLE FILTER DEVELOPED AT SCIENTIFIC RESEARCH ASSOCIATES TO OBTAINHIGH SPECTRAL RESOLUTION WHILE MAINTAINING GOOD SPATIAL RESOLUTION, HIGH SENSITIVITY AND HIGH OPTICAL THROUGHPUT. IN PHASE I THE TECHNIQUE WILL BE DEMONSTRATED IN A CF4 PLASMA WHICH IS WIDELY USED IN SILICON ETCHING.

Principal Investigator:

M. Meyyappan
Senior Research Scientist
2036590333

Business Contact:

Small Business Information at Submission:

Scientific Research Associates
Po Box 1058 Glastonbury, CT 06033

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No