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High Precision in-situ Thickness Control for Growing AlN/GaN/InN-based High…

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
59182
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
022-0606
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sensor Electronic Technology, Inc.
1195 Atlas Road Columbia, SC -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: High Precision in-situ Thickness Control for Growing AlN/GaN/InN-based High Power Transistor Structures
Agency / Branch: DOD / MDA
Contract: DASG6003P0123
Award Amount: $69,740.00
 

Abstract:

We will develop commercially viable AlN/GaN/InN-based epitaxial wafer technology for manufacturing of reliable high microwave power transistors and amplifiers for new generation T/R modules. This technology is based on the development of a reproducibleMOCVD epitaxial layer growth technology using novel high precision in-situ thickness control tools being developed by EMCORE Corp. We will combine our quaternary AlInGaN-based material growth expertise with the state-of-the-art MOCVD growth andcharacterization tools development at EMCORE. Recently, we demonstrated novel AlGaN/InGaN/GaN Double Heterostructure Field Effect Transistor design, which allowed us to suppress the current dispersion and dramatically increase the reliability of thedevices. Despite impressive achievements, production of these devices is impossible without availability of commercial material supply, particularly, of large size epitaxial wafers with highly reproducible material properties. This project will allow us toprecisely control the layer thickness of AlN/GaN/InN materials.

Principal Investigator:

Ohalid Fareed
Research Scientist
8036479757
fareed@s-et.com

Business Contact:

Remis Gaska
President and CEO
8036479757
gaska@s-et.com
Small Business Information at Submission:

Sensor Electronic Technology, Inc.
1195 Atlas Road Columbia, SC 29209

EIN/Tax ID: 141812556
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No