Sinmat Inc. working with University of Florida, proposes to develop an economical and scalable process for fabrication of diamond light emitting diodes (LEDs) that operate in the deep ultraviolet regime. These LEDs are expected to have significant usage inBMDO related activities as compact sources… More

"Gallium Antimonide based hetrostructures have attracted significant interest in recent years because of their applications ranging from 100 GHz high speed logic circuits. For rapid commercialization of these devices, it is necessary to obtain, highsurface quality, surface passivated GaSb… More

This Small Business Innovation Research project proposes to develop novel fluidization systems that are needed for synthesis of nano-encapsulated insulin particles for pulmonary drug delivery applications. By coating the insulin particle with very thin (10-50 nm) layer of biodegradable polymers… More

This Small Business Innovation Research (SBIR) Phase I project will synthesize semiconductor interconnects by using a novel chemical vapor deposition technique for deposition of silver and copper films on high aspect ratio patterned substrates for sub 100 nm CMOS devices. This technique called… More

The Small Business Innovation Research (SBIR) Phase I project will synthesize novel slurries for chemical mechanical planarization (CMP) of low dielectric constant (K) materials. Standard abrasives such as silica and alumina lead to significant scratching, indenting and delamination of the… More

The Small Business Innovation Research (SBIR) Phase I project focuses on the development of novel lithium based cathode materials for high discharge rate applications. Significant attempts have been made in the past decade to commercialize lithium manganospinels but have met with limited success… More

This Small Business Innovation Research Phase II project aims to develop unique chemical mechanical planarization (CMP) slurries based on nanoporous silica particles that will meet or exceed CMP needs of low k dielectrics for the 80 nm and beyond semiconductor manufacturing nodes. The integration… More

79522S In the manufacture of semiconductor interconnects, the copper Chemical Mechanical Planarization (CMP) process uses a slurry composed of large, hard particles that cause defects such as scratches, and delamination of the copper film from the low- k-dielectric-constant matter. To overcome… More

Presently one of the outstanding challenges for rapid commercialization of SiC based device technology for high power/high frequency electronics is the affordable, volume production of damage-free, epi-ready 100 mm SiC wafers that exhibit single atomic steps (terraces). Sinmat Inc. in partnership… More

This Small Business Innovation Research (SBIR) research project aims to develop a single step chemical mechanical polishing (CMP) process for fabrication of next generation of copper based interconnects that join millions of transistors on a chip. The current state of the art copper CMP process is… More

This Small Business Innovation Research (SBIR) Phase I research project will develop a novel gentle atomic scale surface polishing method for GaN and SiC based wide band-gap materials. This process is based on a chemical mechanical smoothening (CMS) technique, which is a unique subset of the novel… More

This Small Business Innovation Research (SBIR) Phase II project proposes to develop and commercialize a single step chemical mechanical polishing (CMP) process for fabrication of next generation of copper based interconnects that join millions of transistors on a chip. The current state of the art… More

Currently one of the outstanding challenges is the affordable, volume production of epi-ready, 100 mm SiC wafers that are scratch-free and have atomic-scale surface finish. As SiC is relatively chemically inert and mechanically hard, aggressive polishing methods involving very hard particles have… More

This Small Business Innovation Research (SBIR) project focuses of novel method for sustained pulmonary release of protein based antitoxins for counter bioterrorism applications. There is a significant need of therapeutic treatments against bioterrorism agents such as anthrax, cholera, tetanus,… More

This Small Business Innovation Research (SBIR) Phase I project focuses on the development of integrated, high performance thin film batteries for portable devices and stand-alone sensors. The rapid development of high performance Li-Mn-O integrated micro-batteries for sensors/communication… More

This Small Business Innovation Research (SBIR) project focuses on development of novel high-temperature annealing system for processing for advanced silicon on insulator (SOI) devices. The present rapid thermal annealing (RTA) systems, lead to substantial profile broadening because of their large… More

The extremely long and multiple polishing steps represent one of the critical challenges for affordable, volume production of high quality 100 mm SiC wafers. As SiC is relatively chemically inert and mechanically hard, aggressive polishing methods involving very hard particles have been used to… More

This small business innovation research (SBIR) Phase I project proposes the development of a novel abrasive-free recyclable copper CMP (AFCMP) recyclable process based on an unique patented iodine chemistry which leads to the formation of a soft, insoluble copper iodide layer on the surface of the… More

This Small Business Innovation Research (SBIR) project proposes to develop a novel single step shallow trench isolation (STI) planarization. An ideal STI Chemical Mechanical Planarization (CMP) process is expected to be a single step process, which directly and rapidly removes the overburden… More

This Small Business Innovation Research Phase II project focuses on development of a novel high-temperature system for processing of advanced silicon devices. Currently used rapid thermal processing (RTP) systems result in substantial dopant profile broadening because of their relatively large time… More

This Small Business Innovation Research (SBIR) Phase II project will develop and scale-up an industrially robust and low cost chemical mechanical smoothening (CMS) process to produce atomically polished gallium nitride (GaN) on silicon substrates for high power and high frequency applications. As… More

Silicon carbide (SiC) has long been recognized as an attractive mirror material due to its superior mechanical and thermal properties when compared to conventional optical materials. However, the extreme mechanical strength results in significant sub-surface damage (SSD) which needs to be removed by… More

Gallium Nitride (GaN) substrates are ideal materials for fabrication of high-power and high-frequency devices based on III-V materials. The current state-of-the-art Chemical Mechanical Polishing (CMP) methods are plagued by several challenges, including, surface charge affects due to surface… More

Solid state lighting is being promoted as the ultimate lamps of future. Though the internal quantum efficiency of OLED devices is almost 100%, external efficiency is a mere 36% mainly because of poor light out-coupling (~40%) from the device. Improvement in light out-coupling to >70% and further… More

The fabrication of high-quality ultra thin (~20 micron) diamond crystals targets for 9 GeV highly polarized photon beams is an outstanding challenge. Current state of the art polishing/thinning techniques are not successful in thinning single crystal diamond to such dimension because of its extreme… More

Silicon Carbide (SiC) due to its superior thermal and mechanical properties serves as an attractive candidate as mirror material. The manufacturing of such mirrors is a critical challenge because of the hardness and chemical inertness of the material. The current state-of-the-art polishing methods… More

The overall goal of the Phase II effort is to develop the novel ultra-rapid chemical mechanical finishing (UCMF) process for SiC mirror manufacturing, and commercialize this process in collaboration with existing vendors using existing equipment infrastructure. Unlike glass and metallic systems, the… More

Diamond crystals with small total thickness variation (TTV) and local thickness variation (LTV) values are needed for position sensitive fast particle detectors for particle tracking/timing, and detecting direct/indirect beams. The fabrication of ultra-flat, low surface defectivity diamond detectors… More

Solid state lighting is being promoted as the ultimate lamps of future. Though the internal quantum efficiency of OLED devices is almost 100%, external efficiency is a mere 36% mainly because of poor light out-coupling (~40%) from the device. Improvement in light out-coupling to & gt;70% and… More

The fabrication of high-quality ultra thin (~20 micron) diamond crystals targets for 9 GeV highly polarized photon beams is an outstanding challenge. Current state of the art polishing/thinning techniques are not successful in thinning single crystal diamond to such dimension because of its extreme… More

As the epi quality of HgCdTe layers is dependent on the quality of silicon surfaces, it is imperative that the (112) Si surfaces be pristine and devoid of defects. Unfortunately, the commercial available (112) Si surfaces are typically poor quality due to the presence of large number of COP (crystal… More

Diamond crystals with small total thickness variation (TTV) and local thickness variation (LTV) values are needed for position sensitive fast particle detectors for particle tracking/timing, and detecting direct/indirect beams. The fabrication of ultra-flat, low surface defectivity diamond detectors… More

ABSTRACT: Silicon carbide electronics technology has several advantages over conventional silicon electronics and it finds its application in several power electronics applications. However, the manufacturing of reliable SiC power devices is a critical challenge because of the degradation of the… More

Sinmat Inc., in collaboration with Exotic Electro-Optics, Inc. proposes to investigate grinding and polishing of large sapphire windows using slurries based on unique nanoporous silica particles. Due to light transparency and high mechanical hardness and inertness, sapphire window materials find… More