USA flag logo/image

An Official Website of the United States Government

Gentle and Non-Contact Slurries for Atomic Scale Chemical Mechanical…

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sinmat Inc
1912 NW 67th Place Gainesville, FL 32653-1649
View profile »
Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2002
Title: Gentle and Non-Contact Slurries for Atomic Scale Chemical Mechanical Smoothening and Passivation of GaSb Substrates
Agency / Branch: DOD / DARPA
Contract: DAAH0103CR019
Award Amount: $98,868.00


"Gallium Antimonide based hetrostructures have attracted significant interest in recent years because of their applications ranging from 100 GHz high speed logic circuits. For rapid commercialization of these devices, it is necessary to obtain, highsurface quality, surface passivated GaSb substrates, which do not exhibit surface quality variations from wafer to wafer, and vendor to vendor. This problem has been attributed to poor surface preparation techniques adopted by the vendors. Standardchemical etching/polishing, mechanical or chemical mechanical polishing (CMP) has not led to optimal results, because of their inability to atomically smoothen the surface and form nanoscale passivation layers. In this project Sinmat Inc. proposes to useand further extend its proprietary chemical mechanical smoothening and passivation(CMSP) technique and non contact abrasive-free CMP(AFCMP) process to achieve atomic level smoothening and passivation on GaSB surfaces. The CMSP technique is based onpressure-dependent polishing to achieve atomic level smoothening and passivation whereas, in AFCMP process, the chemicals form a soft layer which can be removed by the polishing pad. No abrasives are present, which leads to a defect free process. SinmatInc. working with the University of Florida also proposes to develop a measurement protocol based on sophisticated X-Ray methods to characterize the surface quality and passivation in GaSB wafers. Sinmat

Principal Investigator:

Deepika Singh

Business Contact:

Deepika Singh
Small Business Information at Submission:

Sinmat, Inc.
2153 Hawthorne Road, GTEC Center, Suite 106 Gainesville, FL 32641

EIN/Tax ID: 593645729
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No