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SBIR Phase I: Nanoporous Silica Slurry Technology for Enhanced Chemical…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
62765
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
0232709
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sinmat Inc
1912 NW 67th Place GAINESVILLE, FL 32653-
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Woman-Owned: Yes
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2003
Title: SBIR Phase I: Nanoporous Silica Slurry Technology for Enhanced Chemical Mechanical Planarization (CMP) of Low "k" Dielectrics
Agency: NSF
Contract: 0232709
Award Amount: $99,938.00
 

Abstract:

The Small Business Innovation Research (SBIR) Phase I project will synthesize novel slurries for chemical mechanical planarization (CMP) of low dielectric constant (K) materials. Standard abrasives such as silica and alumina lead to significant scratching, indenting and delamination of the soft low K surface. In this project it is proposed to use nanoporous silica based slurries in which the hardness of the particle can be controlled. In the project, synthesis of nanoporous silica particles will first be carried out followed by charcterization; next will be development of the slurry formulation followed by charcterization and finally testing against the specific needs of the CMP application. Commercially, these slurries are expected to reduce surface defects and enhance slurry stability. It is expected that major electronic manufacturing companies will use this new type of slurry. Wafer level experiments are already planned on patterned wafers in collaboration with key industrial partners.

Principal Investigator:

Deepika Singh

Business Contact:

Small Business Information at Submission:

SINMAT INC
2153 Hawthorne Rd Gainesville, FL 32641

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No