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Nanoporous Silica Slurry for Enhanced CMP of Low Power Consumption Copper…

Award Information

Agency:
Department of Energy
Branch:
N/A
Award ID:
72327
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
79522S05-I
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sinmat Inc
1912 NW 67th Place GAINESVILLE, FL -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: Nanoporous Silica Slurry for Enhanced CMP of Low Power Consumption Copper Interconnects
Agency: DOE
Contract: DE-FG02-05ER84255
Award Amount: $99,843.00
 

Abstract:

79522S In the manufacture of semiconductor interconnects, the copper Chemical Mechanical Planarization (CMP) process uses a slurry composed of large, hard particles that cause defects such as scratches, and delamination of the copper film from the low- k-dielectric-constant matter. To overcome these deficiencies, this project will develop technology for introducing nanoporous silica particles into the slurry, which would reduce the hardness of silica particles, increase stability in the slurry, reducing the scratches. The resulting porous-silica-formulated slurries would have lower defectivity and delamination free polishing compared to their nonporous counterparts. Phase I will synthesize nanoporous silica particles, formulate slurries, conduct CMP experiments, and measure CMP performance. In Phase II, integrated testing will be conducted on copper/ultra-low-k dielectrics. Commercial Applications and Other Benefits as described by the awardee: The market for copper slurry is expected to be $300 million by 2008 out of a total CMP market of $600 million. The nanoparticle technology should lead to fewer slurry defects, providing increased yield and lower energy consumption.

Principal Investigator:

Deepika Singh
Dr.
3523347237
singh@sinmat.com

Business Contact:

Deepika Singh
Dr.
3523347237
singh@sinmat.com
Small Business Information at Submission:

Sinmat, Inc.
2153 SE Hawthorne Road GTEC Center, Suite 106 Gainesville, FL 32641

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No