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Rapid,Single Atomic Step Mechano-chemical Polishing (MCP) of Silicon Carbide…

Award Information

Agency:
Department of Defense 		Branch:
Missile Defense Agency 		Award ID:
74803 		Program Year/Program:
2005 / STTR
Agency Tracking Number:
05-0136T 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
SINMAT, INC.
2153 SE Hawthorne Road GTEC Center, Suite 129, Box 2 Gainesville, FL -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: Rapid,Single Atomic Step Mechano-chemical Polishing (MCP) of Silicon Carbide Wafers
Agency / Branch: DOD / MDA
Contract: HQ0006-05-C-7280
Award Amount: $99,999.00
 

Abstract:

Presently one of the outstanding challenges for rapid commercialization of SiC based device technology for high power/high frequency electronics is the affordable, volume production of damage-free, epi-ready 100 mm SiC wafers that exhibit single atomic steps (terraces). Sinmat Inc. in partnership with wafer manufacturers and the University of Florida propose to further develop a novel gentle mechano-chemical polishing (MCP) process for production of clean, epi-ready SiC wafers with atomic terraces. The MCP process is a unique sub-set of the chemical mechanical polishing (CMP) process and is characterized by the use of soft chemically active particles to induce oxidation of silicon carbide surfaces under appropriate chemical conditions. Furthermore, the relatively soft particles remove the film layer without damage to the underlying substrate. Initial experiments on polishing of silicon carbide have yielded extremely promising results. The PI for this project is Rajiv Singh (from the University of Florida and co-founder of Sinmat Inc), who is internationally recognized for his contributions in the CMP of electronic materials.

Principal Investigator:

Rajiv Singh
Professor
3523921032
rsing@mse.ufl.edu

Business Contact:

Deepika Singh
President
3523347237
singh@sinmat.com
Small Business Information at Submission:

Sinmat, Inc.
2153 Hawthorne Road, GTEC Center, Suite 106 Gainesville, FL 32641

EIN/Tax ID: 593645729
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
UNIV. OF FLORIDA
Department of Materials Engr, Rhines Hall
Gainesville, FL 32611
Contact: Rajiv Singh
Contact Phone: (352) 392-1032
RI Type: Nonprofit college or university