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Novel Rapid and Low Damage Mechanical Polishing Method for Low Cost and Volume…

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Sinmat Inc
1912 NW 67th Place Gainesville, FL -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2007
Title: Novel Rapid and Low Damage Mechanical Polishing Method for Low Cost and Volume Manufacturing of 100mm SiC Substrates
Agency / Branch: DOD / MDA
Contract: HQ0006-07-C-7767
Award Amount: $99,976.00


The extremely long and multiple polishing steps represent one of the critical challenges for affordable, volume production of high quality 100 mm SiC wafers. As SiC is relatively chemically inert and mechanically hard, aggressive polishing methods involving very hard particles have been used to achieve high removal rates, but such methods create a high degree of sub-surface damage and scratches. To significantly reduce the manufacturing costs, novel high removal rate and low sub-surface mechanical polishing processes need to be developed. Sinmat proposes to develop a novel mechanical polishing process based on novel nanoparticles that will significantly enhance polishing rates, while at the same time reducing the sub-surface damage. These nanoparticles are expected to combine high hardness with "chemical tooth" capability to achieve high removal rates with low concomitant surface damage. The successful development of such as process is expected to significantly shorten the chemical mechanical planarization (CMP) step and related manufacturing costs. In the Phase I of the SBIR project, feasibility studies will be conducted on small substrates, while in the Phase II this process will be extended to 100 mm silicon carbide substrates.

Principal Investigator:

Deepika Singh

Business Contact:

Deepika Singh
Small Business Information at Submission:

2153 Hawthorne Road GTEC Center, Suite 129, Box2 Gainesville, FL 32641

EIN/Tax ID: 593645729
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No