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SBIR Phase II: Gentle Atomic Level Chemical Mechanical Smoothening (CMS) of…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
74874
Program Year/Program:
2007 / SBIR
Agency Tracking Number:
0512786
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Sinmat Inc
1912 NW 67th Place Gainesville, FL -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2007
Title: SBIR Phase II: Gentle Atomic Level Chemical Mechanical Smoothening (CMS) of Gallium Nitride Substrates
Agency: NSF
Contract: 0646586
Award Amount: $499,900.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase II project will develop and scale-up an industrially robust and low cost chemical mechanical smoothening (CMS) process to produce atomically polished gallium nitride (GaN) on silicon substrates for high power and high frequency applications. As GaN is mechanically hard and chemically inert, traditional surface polishing processes have resulted in significant surface damage which negatively affects the electrical performance. In contrast, the CMS process forms a soft layer on GaN surface which can be removed by nanoparticles. In the Phase II of this project, the company plans to further optimize and scale-up the CMS process. In conjunction with the compound semiconductor chip manufacturers and academic partners, the company's plan is to further validate the polishing technology by fabricating and testing the performance of high electron mobility transistors. The research team members are internationally recognized experts and are in an excellent position to execute the research plan and attain the project goals. The commercialization of the proposed polishing technology is expected to significantly impact GaN based semiconductor technology used for high frequency, high power microwave devices in wireless mobile communication and radar defense systems. This process will accelerate commercialization of GaN on silicon technology by increasing yield and reducing manufacturing costs.

Principal Investigator:

Syamal A. Lahiri
PhD
3523347237
slahiri1@sinmat.com

Business Contact:

Syamal A. Lahiri
PhD
3523347237
slahiri1@sinmat.com
Small Business Information at Submission:

SINMAT, INC.
2153 SE HAWTHORNE RD STE 129 6745 HOLLISTER AVENUE GAINESVILLE, FL 32641

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No