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sbir phase i: Hybrid Jet Vapor Rotating Disk Tool for SiC-Thin Film Devices

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
58530
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
0214614
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Structured Materials Industries
201 Circle Drive North Unit # 102 Piscataway, NJ 08854-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: sbir phase i: Hybrid Jet Vapor Rotating Disk Tool for SiC-Thin Film Devices
Agency: NSF
Contract: N/A
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I project will synthesize will demonstrate that a hybrid system combining the attributes of Jet Vapor Deposition and Rotating Disk Reactors solves existing Silicon Carbide film deposition problems and can be developed to create a superior film production tool. The high speed "jet" convectively transports precursors directly to the surface, overcoming diffusion-limited transport rates, and largely avoiding unwanted pre-reactions in the gas phase; the rotation allows the "jets"to uniformly "paint" the surface with precursor. Our Phase I efforts will focus on proving that the hybrid tool will be a superior tool for Silicon Carbide epitaxy--highly desired for microelectronic devices such as high-power, high-temperature, high frequency devices. Potential commercial applications of the research are expected in reliable, micro-fabrication process. The successful development of Silicon Carbide film deposition would represent an important advancement in metal thin film deposition process.

Principal Investigator:

Gary Tompa
7328855909
gstompa@aol.com

Business Contact:

Small Business Information at Submission:

Structured Materials Industries, Inc.
120 Centennial Avenue Piscataway, NJ 08854

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No