SBIR Phase I: High Volume MOCVD AlGaN Production Tool
This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs.
The commercial applications of this project will be in electronics and optoelectronic device markets.
Small Business Information at Submission:
Structured Materials Industries, Inc.
120 Centennial Avenue Piscataway, NJ 08854
Number of Employees: