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SBIR Phase I: High Volume MOCVD AlGaN Production Tool

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
57828
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
0128093
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Structured Materials Industries
201 Circle Drive North Unit # 102 Piscataway, NJ 08854-3723
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: SBIR Phase I: High Volume MOCVD AlGaN Production Tool
Agency: NSF
Contract: N/A
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I Project will develop a high volume/high pressure RDR-MOCVD nitride production tool. Two fundamental problems will be addressed. The first is the need for large area substrate quality and the second is the need for large area/high volume MOCVD nitride epitaxy production tools. This project will demonstrate a scaleable tool to meet these needs. The commercial applications of this project will be in electronics and optoelectronic device markets.

Principal Investigator:

Gary Tompa
7328855909
gstompa@aol.com

Business Contact:

Small Business Information at Submission:

Structured Materials Industries, Inc.
120 Centennial Avenue Piscataway, NJ 08854

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No