USA flag logo/image

An Official Website of the United States Government

Company Information:

Company Name: Source Tek Inc
City: Poquoson
State: VA
Zip+4: 23662
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Website URL: N/A
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $49,996.00 1

Award List:

HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY

Award Year / Program / Phase: 1989 / SBIR / Phase I
Agency: NSF
Principal Investigator: Sang H Choi , Principal Investigator
Award Amount: $49,996.00
Abstract:
The evolution of vlsic technology further demands innovative and fast submicron lithography which could replicate more densely packed ic at a high throughput. the proposed hypocycloidal pinch (hcp) light source is considered to be an intense x-ray source suitable for submicron and high throughput… More