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HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
10707
Program Year/Program:
1989 / SBIR
Agency Tracking Number:
10707
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Source Tek Inc
24 Carriage Hill Dr Poquoson, VA 23662
View profile »
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1989
Title: HYPOCYCLOIDAL PINCH (HCP) DEVICE FOR X-RAY LITHOGRAPHY
Agency: NSF
Contract: N/A
Award Amount: $49,996.00
 

Abstract:

THE EVOLUTION OF VLSIC TECHNOLOGY FURTHER DEMANDS INNOVATIVE AND FAST SUBMICRON LITHOGRAPHY WHICH COULD REPLICATE MORE DENSELY PACKED IC AT A HIGH THROUGHPUT. THE PROPOSED HYPOCYCLOIDAL PINCH (HCP) LIGHT SOURCE IS CONSIDERED TO BE AN INTENSE X-RAY SOURCE SUITABLE FOR SUBMICRON AND HIGH THROUGHPUT LITHOGRAPHY. THIS DEVICE HAS A NOVEL GEOMETRY WHICH UTILIZES THE PLASMA DYNAMICS HYPOCYCLOIDALLY PINCHED INTO THE RADIAL DIRECTION AND EVENTUALLY RESULTING IN A VERY STABLE, HIGH ENERGY, AND HIGHLY DENSE PLASMA IN ITS AXIAL CENTER. THE EMISSION SPECTRA FROM THIS HIGHLY COMPRESSED AND STABLE PLASMA IS COMPOSED MAINLY OF A WAVEBAND OF INTENSE SOFT X-RAY. THE SIZE OF PINCHED PLASMA IS SO SMALL IN DIAMETER THAT THE PENUMBRA EFFECT CAN BE ALSO MINIMIZED IN THE PHOTO-LITHOGRAPHY. THIS STABLE AND HIGHLY COMPRESSED PLASMA GUARANTEES THE REPRODUCIBILITY OF THE SOFT X-RAY EMISSION AND ITS INTENSE EMISSION ENSURES THE FAST THROUGHTPUT. THE PROPOSED HCP SOFT X-RAY LIGHT SOURCE IS ANINEXPENSIVE SYSTEM, SO THAT IT IS IDEAL FOR THE SMALL BUSINESS ENTITIES AND UNIVERSITY LABORATORIES.

Principal Investigator:

Sang H Choi
Principal Investigator
8048688949

Business Contact:

Small Business Information at Submission:

Source Tek Inc
24 Carriage Hill Dr Poquoson, VA 23662

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No