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GAAS, WHICH HAS BEEN USED FOR MONOLITHIC SURFACE ACOUSITC WAVE (SAW) DEVICES,…

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
1058
Program Year/Program:
1984 / SBIR
Agency Tracking Number:
1058
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
SPIRE CORPORATION
1 PATRIOTS PARK BEDFORD, MA 01730-2396
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1984
Title: GAAS, WHICH HAS BEEN USED FOR MONOLITHIC SURFACE ACOUSITC WAVE (SAW) DEVICES, IS ALSO THE MICROELECTRONIC MATERIAL OF CHOICE FOR HIGH SPEED, HIGH-FREQUENCY APPLICATIONS, AD ITS COMBINATION OF PIEZOELECTRIC AND SEMICONDUCTING PROPERTIES OFFERS THE
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $49,894.00
 

Abstract:

GAAS, WHICH HAS BEEN USED FOR MONOLITHIC SURFACE ACOUSITC WAVE (SAW) DEVICES, IS ALSO THE MICROELECTRONIC MATERIAL OF CHOICE FOR HIGH SPEED, HIGH-FREQUENCY APPLICATIONS, AD ITS COMBINATION OF PIEZOELECTRIC AND SEMICONDUCTING PROPERTIES OFFERS THE OPPORTUNITY TO INTEGRATE SAW AND ELECTRONIC DEVICES IN THE SAME CHIP. SPIRE PROPOSES TO IMPLEMENT THIS INTEGRATION BY THE EPITAXIAL DEPOSITION OF THINFILM GAASON SAPPHIRE SUBSTRATES, WHICH WOULD PROVIDE BOTH ACOUSTIC COUPLING AND DIELECTRIC ISOLATION WITH MINIMAL PARASTIC CAPACITANCE. SPECIFICALLY, THE PHASE I FEASIBILITY RESEARCH IS INTENDED TO DEMONSTRATE THAT HIGH-QUALITY (100) GAAS/(0112) SAPPHIRE EPITAXY CAN BE ACHIEVED; THIS ORIENTATION, WHICH IS PREFERRED BOTH FOR SAW PRO PAGATIO AND FOR MICROELECTRONIC COMPONENT FABRICATION, HAS NOT YET BEEN OBTAINED IN LARGE-AREA GAAS LAYERS ON SAPPHIRE. METALORGANIC CHEMICAL VAPOR DEPOSITION (MO-CVD) WILL BE USED, SINCE THE ABSENCE OF CHLORIDE AND THE LOWER DEPOSITION TEMPERATURES PERMITTED BY THE REACTIONS SHOULD ENHANCE THE PROBABILITY OF SUCCESS. THE DEPOSITION TEMPERATURES, THE REACTNT RATIO, AND THE DEPOSITION RATE WILL BE EXERCISED OVER RANGES CENTERED UPON THE VALUES USED FOR (111) GAAS(0001) SAPPHIRE EXPITAXY. THE GAAS LAYER WILL BE CHARACTERIZED AND THE DEPOSITION PROCESS WILL BE OPTIMIZED.

Principal Investigator:

Robert g. wolfson
6172756000

Business Contact:

Small Business Information at Submission:

Spire Corp
Patriots Park Bedford, MA 01730

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No