USA flag logo/image

An Official Website of the United States Government

IMPLANTATION/EXCIMER LASER ANNEALING FEASIBILITY STUDY

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
4417
Program Year/Program:
1986 / SBIR
Agency Tracking Number:
4417
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Spire Corporation
One Patriots Park Bedford, MA 01730-2396
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1986
Title: IMPLANTATION/EXCIMER LASER ANNEALING FEASIBILITY STUDY
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $63,678.00
 

Abstract:

THE LACK OF A PROCESS TO DOPE ZNS(X)SE(1-X) FOR P-TYPE CONDUCTIVITY IS THE MAJOR OBSTACLE TO THE ADVANCEMENT OF DEVICE TECHNOLOGY BASED ON WIDE BANDGAP P/N HOMOJUNCTIONS. OF PARTICULAR IMPORTANCE ARE LIGHT-EMITTING DIODES AND INJECTION LASERS FABRICATED FROM ZNSXSE(1-X) WHICH OPERATE IN THE BLUE OR ULTRAVIOLET REGIONS OF THE SPECTRUM, ESSENTIAL FOR SOME TYPES OF SOPHISTICATED COMMUNICATION. SPIRE PROPOSES TO DOPE ZNSXSE(1-X) GROWN BY METALORGANIC CHEMICAL VAPOR DEPOSITION P-TYPE BY ION IMPLANTATION, FOLLOWED BY EXCIMERLASER ANNEALING, WHICH WILL "QUENCH IN" DESIRABLE ACCEPTOR LEVELS AT CONCENTRATIONS PREVIOUSLY UNOBTAINABLE BY MORE CONVENTIONAL METHODS. THE PHASE I RESEARCH IS A FEASIBILITY STUDY OF THIS METHOD IN WHICH THE IONS (NITROGEN, VANADIUM, AND PHOSPHORUS) AND IMPLANTATION PARAMETERS WILL BE VARIED AFTER THE LASER PARAMETERS ARE OPTIMIZED. ELECTRICAL MEASUREMENTS WILL BE MADE TO DETERMINE CARRIER TYPE, CONCENTRATION, AND MOBILITY FROM ONE SET OF STRUCTURES, AND JUNCTION CHARACTERISTICS WILL BE MEASURED ON THE SECOND SET. FINALLY, THE EMPIRICAL RESULTS WILL BE COMPARED AND ASSESSED SO THAT THE SUPERIOR ROUTE(S) MAY BE PURSUED IN PHASE II RESEARCH.

Principal Investigator:

Stanley w vernon
6172756000

Business Contact:

Small Business Information at Submission:

Spire Corp
Patriots Pk Bedford, MA 01730

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No