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THE PROPOSED PROJECT ADDRESSES IMPROVED MASK TECHNOLOGY FOR ION BEAM…

Award Information

Agency:
Department of Defense
Branch:
Navy
Award ID:
4418
Program Year/Program:
1986 / SBIR
Agency Tracking Number:
4418
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Spire Corporation
One Patriots Park Bedford, MA 01730-2396
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1986
Title: THE PROPOSED PROJECT ADDRESSES IMPROVED MASK TECHNOLOGY FOR ION BEAM LITHOGRAPHY.
Agency / Branch: DOD / NAVY
Contract: N/A
Award Amount: $69,322.00
 

Abstract:

THE PROPOSED PROJECT ADDRESSES IMPROVED MASK TECHNOLOGY FOR ION BEAM LITHOGRAPHY. SPECIFICALLY, TECHNIQUES FOR PERFECTING THE SILICON MEMBRANE USED IN SUCH MASKS ARE PRESENTED, AND RESEARCH INTENDED TO INCORPORATE SUCH TECHNIQUES IN MEMBRANE FABRICATION IS PROPOSED. IN PHASE I, THE FEASIBILITY OF BOTH IMPROVING THE CRYSTALLINE PERFECTION AND OF ALTERING THE STRESS IN THE MEMBRANES WILL BE EVALUATED. TECHNIQUES INVOLVING BOTH EPITAXY AND ION IMPLANTATION WILL BE INVESTIGATED. IN PHASE II RESEARCH ON IMPROVED MEMBRANES WILL BE CARRIED OUT. THIS RESEARCH WILL BE BASED UPON THE APPROACHES DETERMINED TO BE FEASIBLE IN PHASE I. THE MEMBRANES THUS DEVELOPED WILL BE MADE AVAILABLE TO THE INDUSTRY AS PART OF THE COMMERCIALIZATION IN PHASE III.

Principal Investigator:

Leo geoffroy
6172756000

Business Contact:

Small Business Information at Submission:

Spire Corp
Patriots Pk Bedford, MA 01730

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No