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DEVELOPMENT OF A PLANETARY-MOTION MOCVD REACTOR

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
12995
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
12995
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Spire Corporation
One Patriots Park Bedford, MA 01730-2396
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1991
Title: DEVELOPMENT OF A PLANETARY-MOTION MOCVD REACTOR
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $418,000.00
 

Abstract:

WE PROPOSE HERE THE DEVELOPMENT OF A METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) SYSTEM HAVING IMPROVED SAFETY ASPECTS AND SOURCEUTILIZATION EFFICIENCY. OUR NOVEL DESIGN EMPLOYS A PLANETARY-MOTION SUSCEPTOR WHICH IS ROTATED AND LEVITATED SOLEY BY GAS FLOW STREAMS. THIS LARGE-CAPACITY PRODUCTION REACTOR HOLDS UP TO SIX 4-INCH DIAMETER WAFERS PER BATCH, HAS A STAINLESS STEEL ENVELOPE FOR SAFETY, AND UTILIZES A WAFER-TRANSFER LOAD-LOCK MECHANISM FOR INCREASED SAFETY, THROUGHPUT, AND YEILD. THE UE OF A PLANETARY-MOTION SUSCEPTOR WITH A RADIALLY OUTWARD GAS-FLOW PATTERN ENABLES THE ACHIEVEMENT OF BOTH EXCELLENT GROWTH UNIFORMITY AND HIGH SOUCEUTILIZATION EFFICIENCY OVER A LARGE DEPOSITION AREA. THE PHASE I EFFORT WILL CONSIST OF DESIGNING THE DETAILS OF THIS SYSTEM AND CONSTRUCTING A SIMPLIFIED WORKING MODEL; COMPLETE SYSTEM FABRICATION, INSTALLATION AND OPERATION WILL OCCUR IN PHASE II. THE ESTABLISHMENT OF SUCH AN ADVANCED TECHNOLOGY WILL HELP INSURE THAT THE GOVERNMENT HAS A U.S.-BASED COMMERCIAL SUPPLY OF BOTH MOCVD SYSTEMS AND EPITAXIAL WAFERS.

Principal Investigator:

Stanley M Vernon
6172756000

Business Contact:

Small Business Information at Submission:

Spire Corp.
Patriots Pk Bedford, MA 01730

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No